Veeco DekTak 6M Stylus Profiler

-  Measures step heights on any surface,

-  Programmable stylus force down to 1 mg

-  Z-height capability from 0.1 nm to 1 mm

-  Scan lengths to 25 mm

-  Measure surface roughness, waviness, texture

μSurf Nanofocus - Confocal Optical Profiler

-  3D optical measurement system based on whitelight confocal microscopy

-  Measure optically complex surface structures while maintaining high vertical and lateral resolution

Omniscan MicroXAM 5000B 3D ADE Phase Shift Interference Contrast Optical Profiler

-  Non-contact profiler

-  Measures step heights from less than 1 nm (10 Angstrom or 0.001 μm) up to 100 μm

-  3D surface mapping

-  Quantitative, visual and confocal modes using optical interferometry

-  NIST traceable correlation

-  Calculation of peak, plateau, summit and valley surface statistics including analysis of of peak, plateau, summit and valley surface characteristics

-  Fourier and autocovariance analysis and surface filtering

-  Interactive zoom

-  X-Y and line segment profiles

-  3D wire, hybrid and solid plots

-  Area difference plot for step height measurement

-  Fourier analysis for visualizing and characterizing periodic structures in surface maps

-  Stitching of measurements to form a large scale, high-density map


  Veeco DekTak 6M stylus profiler


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μSurf Nanofocus (L) and Omniscan MicroXAM 5000B (R) optical profilers