Veeco DekTak 6M Stylus Profiler
- Measures step heights on any surface,
- Programmable stylus force down to 1 mg
- Z-height capability from 0.1 nm to 1 mm
- Scan lengths to 25 mm
- Measure surface roughness, waviness, texture
μSurf Nanofocus - Confocal Optical Profiler
- 3D optical measurement system based on whitelight confocal microscopy
- Measure optically complex surface structures while maintaining high vertical and lateral resolution
Omniscan MicroXAM 5000B 3D ADE Phase Shift Interference Contrast Optical Profiler
- Non-contact profiler
- Measures step heights from less than 1 nm (10 Angstrom or 0.001 μm) up to 100 μm
- 3D surface mapping
- Quantitative, visual and confocal modes using optical interferometry
- NIST traceable correlation
- Calculation of peak, plateau, summit and valley surface statistics including analysis of of peak, plateau, summit and valley surface characteristics
- Fourier and autocovariance analysis and surface filtering
- Interactive zoom
- X-Y and line segment profiles
- 3D wire, hybrid and solid plots
- Area difference plot for step height measurement
- Fourier analysis for visualizing and characterizing periodic structures in surface maps
- Stitching of measurements to form a large scale, high-density map
